The world's largest contract chipmaker Taiwan Semiconductor Manufacturing Co posted revenue of $511.86 billion New Taiwan dollars ($16.03 billion) for September, up 54.6% on the year prior, but down 0.6% on August.
Its third quarter revenue came around $NT1.49 trillion.
The company closed 1.35% lower ahead of releasing monthly figures.
TSMC, which counts Nvidia and Apple among its customers, has been a major beneficiary of surging demand for advanced AI chips.
In September, TSMC committed to using ASML's High NA extreme ultraviolet lithography machines, a key technology for producing more advanced chips, joining Samsung Electronics among customers adopting the technology.
It is scheduled to report its third-quarter earnings next week.
Correction: The story has been updated to reflect that sales did not hit a record high in September.